François Schiettekatte
- Professeur titulaire
-
Faculté des arts et des sciences - Département de physique
Complexe des sciences office B-4419
Web : Google Scholar
Web : Autre site web
Affiliations
- Directeur adjoint – GCM — Groupe de recherche en physique et technologie des couches minces
- Membre – RQMP — Regroupement québécois sur les matériaux de pointe
Education Programs
- Fundamental and Applied Sciences Life Sciences
- Fundamental and Applied Sciences
Courses
- PHY6918 Concepts de radioprotection pour le génie clinique
Areas of Expertise
- Materials science
- Defects and impurities in thin films: doping, implantation
- Atom, molecule, and ion scattering
- Deposition by sputtering
- Kinetics of defect formation and annealing
- Atomic, molecular, and ion beam impact and interactions with surfaces
- Heat capacity of amophous solids and glasses
- Nanoscale materials and structures: fabrication and characterization
Ion implantation is a technique for modifying the surface of materials by injecting precise quantities of atoms at the desired depth. It is widely used in doping semiconductors when manufacturing very large-scale integrated circuits (VLSI). Since it is a highly out-of-balance phenomenon (the incident atoms typically have energies millions of times higher than the atoms in the material), this implantation often generates new structures at the atomic level that can be exploited to improve the performance of high-tech materials, or may create problems to be overcome.
For instance, during the doping process, implantation creates defects in semiconductors by displacing crystal atoms, and this is damaging to integrated circuits. If there are not too many defects, the damage can be corrected by annealing and the dopant activated. If the density of the defects exceeds a certain threshold, however, permanent damage will appear in the materials and may make the devices unusable.
Inversely, ion implantation generates defects that can be used to modify materials. Implantation makes it possible to create defects near the surface that can later diffuse throughout the material and modify the composition of the lower layers by interdiffusion. In this way it is possible to change the emission wavelengths of quantum dots or wells and the properties of the magnetic layers.
Ion beams can also be used for highly sensitive quantitative measurement of the deep distribution of atoms in a material. In our laboratories we use various ion beam analysis techniques, in particular elastic recoil detection (ERD), a technique developed in our laboratories in the 1970s, and Rutherford backscattering spectrometry (RBS), RBS channelling and nuclear resonant reaction analysis (NRRA).
Student supervision Expand all Collapse all
Cycle : Master's
Grade : M. Sc.
Cycle : Master's
Grade : M. Sc.
Research projects Expand all Collapse all
Regroupement québécois sur les matériaux de pointe (RQMP) Projet de recherche au Canada / 2022 - 2029
Relaxation, friction interne et ondes gravitationnelles Projet de recherche au Canada / 2022 - 2028
Plateforme d'iinovation en procédés plasma avec caractérisation in-plasma des matériaux et nanomatériaux Projet de recherche au Canada / 2021 - 2027
Relaxation, friction interne et ondes gravitationnelles Projet de recherche au Canada / 2022 - 2026
Contrôle des contraintes mécaniques résiduelles dans les revêtements optiques: de leurs origine aux applications avancées Projet de recherche au Canada / 2021 - 2024
Regroupement québécois sur les matériaux de pointe ( RQMP ) Projet de recherche au Canada / 2019 - 2024
Electron microscopy analysis of (nano)materials with environmental, biological and industrial importance Projet de recherche au Canada / 2021 - 2023
CALCUL QUEBEC Projet de recherche au Canada / 2015 - 2023
EVOLUTION OF NANOSCALE GLASSES Projet de recherche au Canada / 2014 - 2023
Bourse de stage international - Mané Seck / Regroupement québécois sur les matériaux de pointe ( RQMP ) Projet de recherche au Canada / 2020 - 2021
Bourse de stage international - Megan Cowie / Regroupement québécois sur les matériaux de pointe ( RQMP ) Projet de recherche au Canada / 2020 - 2021
Supplément COVID-19 CRSNG_EVOLUTION OF NANOSCALE GLASSES Projet de recherche au Canada / 2020 - 2021
Regroupement québécois sur les matériaux de pointe (RQMP) Hosted by McGill 2017-2021 Projet de recherche au Canada / 2017 - 2021
Plateforme d'iinovation en procédés plasma avec caractérisation in-plasma des matériaux et nanomatériaux Projet de recherche au Canada / 2016 - 2021
Regroupement québécois sur les matériaux de pointe Projet de recherche au Canada / 2015 - 2021
DEVELOPMENT OF GERMANIUM FIBER BRAGG GRATINGS AND ER-DOPED FIBER AMPLIFIERS FOR OPERATION IN HARSH ENVIRONMENTS Projet de recherche au Canada / 2013 - 2016
REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE (RQMP) Projet de recherche au Canada / 2013 - 2016
DETECTEURS TERAHERTZ A BASE D'INGAASP ET SYSTÈME D'IMAGERIE THZ EN CHAMP PROCHE Projet de recherche au Canada / 2012 - 2016
REGROUPEMENT STRATEGIQUE - REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE (RQMP) Projet de recherche au Canada / 2009 - 2016
REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE - RQMP Projet de recherche au Canada / 2009 - 2016
DETECTEURS TERAHERTZ A BASE D'INGAASP ET SYSTÈME D'IMAGERIE THZ EN CHAMPS PROCHE Projet de recherche au Canada / 2012 - 2015
CANADIAN CHARGED PARTICLE ACCELERATOR CONSORTIUM (CCPAC) Projet de recherche au Canada / 2011 - 2015
DEVELOPING METHODS OF ULTRATHIN FILMS CHARACTERISATION: NANOCALORIMETRY AND ION BEAM ANALYSIS Projet de recherche au Canada / 2001 - 2015
GROUPE DE RECHERCHE EN PHYSIQUE ET TECHNOLOGIE DES COUCHES MINCES (GCM) - INSTALLATION CENTRALE POUR LA FABRICATIONET LA CARACTERISATION DES MATERIAUX ET DISPOSITIFS DE POINTE Projet de recherche au Canada / 2008 - 2014
DEVELOPING METHODS OF ULTRATHIN FILMS CHARACTERISATION: NANOCALORIMETRY AND ION BEAM ANALYSIS Projet de recherche au Canada / 2009 - 2013
ALUMINUM ADHESION OF POLYETHYLENE TEREPHTHALATE Projet de recherche au Canada / 2011 - 2012
Publications Expand all Collapse all
Articles publiés (depuis 2018, nom en gras = membres du groupe)
136. K. J. Daniel, J. R. Smith, S. Ballmer, W. Bristol, J. C. Driggers, A. Effler, M. Evans, J. Hoover, K. Kuns, M. Landry, G. Lovelace, C. Lukinbeal, V. Mandic, K. Pham, J. Read, J. B. Russell, F. Schiettekatte, R. M. S. Schofield, C. A. Scholz, D. H. Shoemaker, P. Sledge, A. Strunk, Criteria for identifying and evaluating locations that could potentially host the Cosmic Explorer observatories, Rev. Sci. Instrum. 96, 014502 (2025).
135. P. Vinchon, S. Hamaguchi, S. Roorda, F. Schiettekatte, L. Stafford, Self-healing kinetics in monolayer graphene following very low energy ion irradiation, Carbon 233, 119852 (2025).
134. S. Bhowmick, R. Osovsky, A. Davenport, F. Schiettekatte, M. Chicoine, C. S. Menoni, Unveiling the cation ratio mediated structural modifications in TiO2: GeO2 mixtures for gravitational-wave detectors, Class. Quant. Grav. 41, 105007 (2024).
133. D. Diksha, A. Amato, V. Spagnuolo, G. I. McGhee, M. Chicoine, C. Clark, S. Hill, J. Hough, R. Johnston, R. Keil, Optical properties of germania and titania at 1064 nm and at 1550 nm, Class. Quant. Grav. 41, 125006 (2024).
132. L.-C. Fortier, M. Chicoine, S. Chouteau, M. Clausse, É. Lalande, A. W. Lussier, S. Roorda, L. Stafford, G. Terwagne, F. Schiettekatte, In plasma ion beam analysis of polymer layer and adsorbed H monolayer etching, Nucl. Instrum. Meth. B 554, 083305 (2024).
131. É. Lalande, A. Davenport, L. Marchand, A. Markosyan, D. Martinez, A. Paolone, M. Rezac, M. Bazzan, M. Chicoine, J. L. Colaux, M. Coulon, M. M. Fejer, A. W. Lussier, E. Majorana, L. Martinu, C. Menoni, C. Michel, F. Ricci, F. Schiettekatte, N. Shcheblanov, J. R. Smith, J. Teillon, G. Terwagne, G. Vajente, Ar transport and blister growth kinetics in titania-doped germania-based optical coatings, Class. Quant. Grav. 41, 115013 (2024).
130. A. W. Lussier, D. Bourbonnais-Sureault, M. Chicoine, R. Martel, L. Martinu, S. Roorda, F. Schi- ettekatte, Raman-based mapping and depth-profiling of the relaxation state in amorphous silicon, J. Appl. Phys. 135, 065301 (2024).
128. A. Aghdaei, A. Akbari-Sharbaf, M. Chicoine, F. Schiettekatte, G. Fanchini, D. Morris, Experimental evidence for spin–triplet states in titanium implanted AlN film: an electron spin resonance study, Physica B 654, 414708 (2023).
127. C. Gier, M. Ben Yaala, C. Wiseman, S. MacFoy, M. Chicoine, F. Schiettekatte, J. Hough, S. Rowan, I. Martin, P. MacKay, S. Reid, Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition, Thin Solid Films 771, 139781 (2023).
126. G. I. McGhee, V. Spagnuolo, N. Demos, S. C. Tait, P. G. Murray, M. Chicoine, P. Dabadie, S. Gras, J. Hough, G. A. Iandolo, Titania mixed with silica: a low thermal-noise coating material for gravitational- wave detectors, Phys. Rev. Lett. 131, 171401 (2023).
124. K. Prasai, K. Lee, B. Baloukas, H.-P. Cheng, M. Fazio, L. Martinu, A. Mehta, C. S. Menoni, F. Schi- ettekatte, R. Shink, B. Shyam, G. Vajente, M. M. Fejer, R. Bassiri, Effects of elevated-temperature deposition on the atomic structure of amorphous Ta2O5 films, APL Mater. 11, 121112 (2023).
123. P. Vinchon, S. Asadollahi, C. Coté, S. Marcet, S. Atallah, E. Dessureault, M. Chicoine, A. Sarkissian, R. Leonelli, S. Roorda, In-plasma analysis of plasma–surface interactions, Rev. Sci. Instrum. 94, 083305 (2023).
120. M. Granata, A. Amato, M. Bischi, M. Bazzan, G. Cagnoli, M. Canepa, M. Chicoine, A. D. Michele, G. Favaro, D. Forest, G. M. Guidi, G. Maggioni, F. Martelli, M. Menotta, M. Montani, F. Piergiovanni, F. Schiettekatte, Optical and mechanical properties of ion-beam-sputtered MgF2 thin films for gravitational- wave interferometers, Phys. Rev. Appl 17, 034058 (2022).
119. C. Lévesque, S. Roorda, F. Schiettekatte, N. Mousseau, Internal mechanical dissipation mechanisms in amorphous silicon, Phys. Rev. Mater. 6, 123604 (2022).
118. A. W. Lussier, É. Lalande, M. Chicoine, C. Lévesque, S. Roorda, B. Baloukas, L. Martinu, G. Vajente, A. Ananyeva, F. Schiettekatte, Hydrogen concentration and mechanical dissipation upon annealing in zirconia-doped tantala thin films for gravitational wave observatory mirrors, in Journal of physics: conference series, Vol. 2326 (IOP Publishing, 2022), 012020.
116. M. Abernathy, A. Amato, A. Ananyeva, S. Angelova, B. Baloukas, R. Bassiri, G. Billingsley, R. Birney, G. Cagnoli, M. Canepa, M. Coulon, J. Degallaix, A. Di Michele, M. A. Fazio, M. M. Fejer, D. Forest, C. Gier, M. Granata, A. M. Gretarsson, E. M. Gretarsson, E. Gustafson, E. J. Hough, M. Irving, É. Lalande, C. Lévesque, A. W. Lussier, A. Markosyan, I. W. Martin, L. Martinu, B. Maynard, C. S. Menoni, C. Michel, P. G. Murray, C. Osthelder, S. Penn, L. Pinard, K. Prasai, S. Reid, R. Robie, S. Rowan, B. Sassolas, F. Schiettekatte, R. Shink, S. Tait, J. Teillon, G. Vajente, M. Ward, L. Yang, Exploration of co-sputtered Ta2O5–ZrO2 thin films for gravitational-wave detectors, Class. Quant. Grav. 38, 195021 (2021).
115. É. Lalande, A. W. Lussier, C. Lévesque, M. Ward, B. Baloukas, L. Martinu, G. Vajente, G. Billingsley, A. Ananyeva, R. Bassiri, M. M. Fejer, F. Schiettekatte, Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors, J. Vac. Sci. Technol. A 39, 043416 (2021).
113. H. Nozard, F. Schiettekatte, Arrhenius behavior of crystallization at up to 184 000 K/s in Ge2Sb2Te5 thin films, AIP Adv. 11, 085226 (2021).
112. F. Schiettekatte, Energy conservation strategies for electric vehicles on hills, Am. J. Phys 89, 1018–1025 (2021).
111. G. Vajente, L. Yang, A. Davenport, M. Fazio, A. Ananyeva, L. Zhang, G. Billingsley, K. Prasai, A. Markosyan, R. Bassiri, M. M. Fejer, M. Chicoine, F. Schiettekatte, C. S. Menoni, Low mechanical loss TiO2:GeO2 coatings for reduced thermal noise in gravitational wave interferometers, Phys. Rev. Lett. 127, 071101 (2021).
110. L. Yang, G. Vajente, M. Fazio, A. Ananyeva, G. Billingsley, A. Markosyan, R. Bassiri, K. Prasai, M. M. Fejer, M. Chicoine, F. Schiettekatte, C. S. Menoni, Enhanced medium-range order in vapor-deposited germania glasses at elevated temperatures, Sci. Adv. 7, eabh1117 (2021).
109. A. Aghdaei, R. Pandiyan, B. Ilahi, M. Chicoine, M. El Gowini, F. Schiettekatte, L. G. Frechette, D. Morris, Engineering visible light emitting point defects in Zr-implanted polycrystalline AlN films, J. Appl. Phys. 128, 245701 (2020).
108. M. Sun, S. Li, J. Zou, Z. Cui, Q. Zhang, F. Schiettekatte, D. Barba, B. Liu, Y. Wang, Graphene- wrapped ZnMn2O4 nanoparticles with enhanced performance as lithium-ion battery anode materials, Nano 15, 2050117 (2020).
107. S. Vallières, M. Salvadori, P. Puyuelo-Valdes, S. Payeur, S. Fourmaux, F. Consoli, C. Verona, E. d’Humières, M. Chicoine, S. Roorda, F. Schiettekatte, P. Antici, Thomson parabola and time-of-flight detector cross-calibration methodology on the ALLS 100 tw laser-driven ion acceleration beamline, Rev. Sci. Instrum. 91, 103303 (2020).1
105. A. Albert, M. André, M. Anghinolfi, M. Ardid, J.-J. Aubert, J. Aublin, T. Avgitas, B. Baret, J. Barrios- Martí, S. Basa, Search for multimessenger sources of gravitational waves and high-energy neutrinos with advanced LIGO during its first observing run, ANTARES, and IceCube, Astrophys. J. 870, 134 (2019).
104. K. Prasai, J. Jiang, A. Mishkin, B. Shyam, S. Angelova, R. Birney, D. A. Drabold, M. Fazio, E. K. Gustafson, G. Harry, S. Hoback, J. Hough, C. Lévesque, I. MacLaren, A. Markosyan, I. W. Martin, C. S. Menoni, P. G. Murray, S. Penn, S. Reid, R. Robie, S. Rowan, F. Schiettekatte, R. Shink, A. Turner, G. Vajente, H.-P. Cheng, M. M. Fejer, A. Mehta, R. Bassiri, High precision detection of change in intermediate range order of amorphous zirconia-doped tantala thin films due to annealing, Phys. Rev. Lett. 123, 045501 (2019).
103. S. Vallières, C. Bienvenue, P. Puyuelo-Valdes, M. Salvadori, E. d’Humières, F. Schiettekatte, P. Antici, Low-energy proton calibration and energy-dependence linearization of EBT-XD radiochromic films, Rev. Sci. Instrum. 90, 083301 (2019).
102. G. Vajente, R. Birney, A. Ananyeva, S. Angelova, R. Asselin, B. Baloukas, R. Bassiri, G. Billings- ley, M. M. Fejer, D. Gibson, L. J. Godbout, E. Gustafson, A. Heptonstall, J. Hough, S. MacFoy, A. Markosyan, I. W. Martin, L. Martinu, P. G. Murray, S. Penn, S. Roorda, S. Rowan, F. Schiettekatte, R. Shink, C. Torrie, D. Vine, S. Reid, R. X. Adhikari, Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings, Class. Quant. Grav. 35, 075001 (2018).
101. J. Wang, S. H. Y. Huang, C. Herrmann, S. A. Scott, F. Schiettekatte, K. L. Kavanagh, Focussed helium ion channeling through Si nanomembranes, J. Vac. Sci. Technol. B 36, 021203 (2018).
Additional Information
- 09-09-2015 Les laboratoires insolites de l’UdeM
- 01-01-2015 - Octroi de plus de 26 M$ pour la recherche à l'UdeM
- 02-06-2014 - Ma fenêtre est une centrale électrique!
- 04-09-2013 - Une seconde
- 03-09-2010 - Montréal hôte de l’International Conference on Ion Beam Modification of Materials
- 03-09-2008 - Mesurer la chaleur libérée par des nanocristaux
Media
Regroupement québécois des matériaux de pointe
Browse this profile on: